[1] Zhang Jinlong, Chen Congyan, Yu Lingling, et al. Ultra-precision alignment techniquebased on modified Moiré signals [J]. Journal of Southeast University (English Edition), 2005, 21 (1): 16-19. [doi:10.3969/j.issn.1003-7985.2005.01.004]
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Ultra-precision alignment techniquebased on modified Moiré signals(
)
基于修正莫尔信号的超精密定位技术
)Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]
- Volumn:
- 21
- Issue:
- 2005 1
- Page:
- 16-19
- Research Field:
- Automation
- Publishing date:
- 2005-03-30
Info
- Title:
- Ultra-precision alignment techniquebased on modified Moiré signals
- 基于修正莫尔信号的超精密定位技术
- Author(s):
- Zhang Jinlong1; 2; Chen Congyan1; Yu Lingling1; Liu Jingnan1
-
1Department of Automatic Control Engineering, Southeast University, Nanjing 210096, China
2College of Electrical and Electronic Engineering, Nanjing Normal University, Nanjing 210042, China
- PACS:
- TP274+.5
- DOI:
- 10.3969/j.issn.1003-7985.2005.01.004
- Abstract:
- A novel method for automatic ultra-precision alignment is presented.This method relies on the modified Moiré technique, and alignment marks are used in the form of gratings.The modified Moiré technique can effectively improve detecting sensitivity of signals and simplify the control system by using only one pair of laser-Moiré sensors.We present the mathematical model and simulation results of diffracting two gratings.The effect of various parameters on Moiré signals is studied theoretically and experimentally, and the results are found to be consistent.A computer controlled alignment device using one pair of Moiré sensors is designed.The device can achieve a fully automatic precision alignment by the modified Moiré signal.The experimental result shows that the alignment device can obtain the resolution of 5 nm and the positioning accuracy of ±0.5 μm.
- 提出了一种新的超精密定位方法, 该方法基于修正莫尔技术, 以衍射光栅作为定位标记, 可有效提高位置检测信号的灵敏度, 且结构简单.建立了双光栅位移测量的数学模型, 并进行了计算机仿真, 用实验验证了激光莫尔信号特性的理论计算结果与实验测定结果的一致性.在此基础上, 构建了一套以工业控制计算机为核心的精密定位装置, 以修正莫尔信号为控制信号, 由微机控制实现精密自动定位.系统通过软硬件方面的一系列抗干扰措施, 确保了定位的高精度.实验结果表明基于修正莫尔信号的全自动精密定位装置可获得5 nm的位移分辨率及±0.5 μm的定位精度.
References:
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[11] Zhang Yingxin, Liu Jingnan, Chen Congyan.Research on high-accuracy position detection and alignment technology[J].Journal of Southeast University (Natural Science Edition), 2003, 33(4):495-497.(in Chinese)
Memo
- Memo:
- Biographies: Zhang Jinlong(1965—), male, graduate, associate professor, zjl0310@163.com;Liu Jingnan(corresponding author), male, doctor, professor, liujn@seu.edu.cn.