[1] Zhang Jinlong, Chen Congyan, Yu Lingling, et al. Ultra-precision alignment techniquebased on modified Moiré signals [J]. Journal of Southeast University (English Edition), 2005, 21 (1): 16-19. [doi:10.3969/j.issn.1003-7985.2005.01.004]
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Ultra-precision alignment techniquebased on modified Moiré signals(
)
)Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]
- Volumn:
- 21
- Issue:
- 2005 1
- Page:
- 16-19
- Research Field:
- Automation
- Publishing date:
- 2005-03-30
Info
- Title:
- Ultra-precision alignment techniquebased on modified Moiré signals
- Author(s):
- Zhang Jinlong1; 2; Chen Congyan1; Yu Lingling1; Liu Jingnan1
-
1Department of Automatic Control Engineering, Southeast University, Nanjing 210096, China
2College of Electrical and Electronic Engineering, Nanjing Normal University, Nanjing 210042, China
- PACS:
- TP274+.5
- DOI:
- 10.3969/j.issn.1003-7985.2005.01.004
- Abstract:
- A novel method for automatic ultra-precision alignment is presented.This method relies on the modified Moiré technique, and alignment marks are used in the form of gratings.The modified Moiré technique can effectively improve detecting sensitivity of signals and simplify the control system by using only one pair of laser-Moiré sensors.We present the mathematical model and simulation results of diffracting two gratings.The effect of various parameters on Moiré signals is studied theoretically and experimentally, and the results are found to be consistent.A computer controlled alignment device using one pair of Moiré sensors is designed.The device can achieve a fully automatic precision alignment by the modified Moiré signal.The experimental result shows that the alignment device can obtain the resolution of 5 nm and the positioning accuracy of ±0.5 μm.
References:
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[10] Zhou L Z, Furuhasi H, Uchida Y.Sensing characteristics of a precision aligner using Moiré gratings for precision alignment system [J].Chinese Journal of Lasers B (English Edition), 2001, 10(4):257-262.
[11] Zhang Yingxin, Liu Jingnan, Chen Congyan.Research on high-accuracy position detection and alignment technology[J].Journal of Southeast University (Natural Science Edition), 2003, 33(4):495-497.(in Chinese)
Memo
- Memo:
- Biographies: Zhang Jinlong(1965—), male, graduate, associate professor, zjl0310@163.com;Liu Jingnan(corresponding author), male, doctor, professor, liujn@seu.edu.cn.