|Table of Contents|

[1] Yang Bo, Zhou Bailing, Wang Shourong,. Quadrature error and offset error suppression circuitryfor silicon micro-gyroscope [J]. Journal of Southeast University (English Edition), 2008, 24 (4): 487-491. [doi:10.3969/j.issn.1003-7985.2008.04.018]
Copy

Quadrature error and offset error suppression circuitryfor silicon micro-gyroscope()
硅微陀螺仪正交误差和失调误差抑制线路
Share:

Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]

Volumn:
24
Issue:
2008 4
Page:
487-491
Research Field:
Instrument Science and Technology
Publishing date:
2008-12-30

Info

Title:
Quadrature error and offset error suppression circuitryfor silicon micro-gyroscope
硅微陀螺仪正交误差和失调误差抑制线路
Author(s):
Yang Bo, Zhou Bailing, Wang Shourong
School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
杨波, 周百令, 王寿荣
东南大学仪器科学与工程学院, 南京 210096
Keywords:
silicon micro-gyroscope(SMG) quadrature error offset error closed-loop feedback stability of zero bias
硅微陀螺仪 正交误差 失调误差 闭环反馈 零偏稳定性
PACS:
U666.123
DOI:
10.3969/j.issn.1003-7985.2008.04.018
Abstract:
The reasons for inducing quadrature error and offset error are analyzed and the expressions of quadrature error and offset error are induced.The open-loop system analysis indicates that, in order to avoid the appearance of harmonic peaks, the frequency difference δf between drive mode and sense mode must be less than 1/(2Qy).In order to eliminate the effects of the quadrature error and the offset error, as well as the inherent non-linearity in the capacitance-type sensors, a closed-loop feedback control circuit with quadrature correction is designed.The experimental results indicate that the quadrature error and offset error are corrected.By comparing with open-loop detection, the closed-loop feedback control circuit with quadrature correction decreases the non-linearity of the scale factor from 16.02% to 0.35%, widens the maximum rate capability from ±270(°)/s to ± 370(°)/s and increases the stability of zero bias from 155.2(°)/h to 60.6(°)/h.
分析了正交误差和失调误差产生的原因, 推导了正交误差和失调误差的表达式.开环系统分析表明, 为了避免开环系统出现谐振峰, 两模态(驱动模态与敏感模态)频差δf必须小于1/(2Qy).为了消除正交误差、失调误差及电容传感器自身非线性的影响, 设计了一个可实现正交误差校正的闭环反馈电路.实验结果表明, 正交误差和失调误差得到较好抑制.与开环检测相比, 闭环反馈回路将标度因数非线性从16.02%减少到0.35%, 将最大测量范围从±270(°)/s扩展到± 370(°)/s, 将零偏稳定性从155.2(°)/h提高到60.6(°)/h.

References:

[1] Geen John A.Very low cost gyroscopes[J].Sensors, 2005, 37(3):537-540.
[2] Dixon Richard H, Bouchaud Jérémie.Markets and applications for MEMS inertial sensors[C]//Proceedings of SPIE, MEMS/MOEMS Components and Their Applications Ⅲ.San Jose, 2006, 6113:611306.
[3] Barbour Neil, Schmidt George.Inertial sensor technology trends[J].IEEE Sensors Journal, 2001, 1(4):332-339.
[4] Shkel A, Howe R.Dynamic and control of micromachined gyroscope[C]//1999 American Control Conference.San Diego, 1999:2119-2124.
[5] Braxmaierl M, GaiBerl A, Link T.Cross-coupling of the oscillation modes of vibratory gyroscopes[C]//The 12th International Conference on Solid State Sensors, Actuators and Microsystem.Boston, 2003:167-170.
[6] Iyer Sitaraman V.Modeling and simulation of non-idealities in a z-axis CMOS-MEMS gyroscope[D].Pittsburgh:Carnegie Mellon University, 2003.
[7] Alper Said Emre, Akin Tayfun.Symmetrical and decoupled nickel microgyroscope on insulating substrate[J].Sensors and Actuators A, 2004, 115((2/3):336-350.
[8] Geiger W, Butt W U, Gaiber A, et al.Decouple microgyros and the design principle daver[J].Sensors and Actuators A, 2004, 95(2/3):239-249.
[9] Kim D J, M’Closkey R T.Real-time tuning of MEMS gyro dynamics[C]//2005 American Control Conference.Portland, 2005:3598-3603.

Memo

Memo:
Biography: Yang Bo(1979—), male, doctor, lecturer, yangbo20022002@163.com.
Citation: Yang Bo, Zhou Bailing, Wang Shourong.Quadrature error and offset error suppression circuitry for silicon micro-gyroscope[J].Journal of Southeast University(English Edition), 2008, 24(4):487-491.
Last Update: 2008-12-20