[1] Xia Guoming, Yang Bo, Wang Shourong,. New digital drive phase control for improving bias stabilityof silicon MEMS gyroscope [J]. Journal of Southeast University (English Edition), 2011, 27 (1): 47-51. [doi:10.3969/j.issn.1003-7985.2011.01.010]

Copy

New digital drive phase control for improving bias stabilityof silicon MEMS gyroscope()

新型驱动相位控制技术提高硅微机械陀螺仪稳定性的方法

Share：

Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]

Volumn:

27

Issue:

2011 1

Page:

47-51

Research Field:

Instrument Science and Technology

Publishing date:

2011-03-30

Info

Title:

New digital drive phase control for improving bias stabilityof silicon MEMS gyroscope

新型驱动相位控制技术提高硅微机械陀螺仪稳定性的方法

Author(s):

Xia Guoming;  Yang Bo;  Wang Shourong

Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education, Southeast University, Nanjing 210096, China

夏国明;  杨波;  王寿荣

东南大学微惯性仪表与先进导航技术教育部重点实验室, 南京210096

Keywords:

silicon micro-electro mechanical system(MEMS)gyroscope;  bias drift;  drive phase control;  field-programmable gate array(FPGA)

硅微机械陀螺仪;  零偏漂移;  驱动相位控制;  现场可编程门阵列

PACS:

U666.123

DOI:

10.3969/j.issn.1003-7985.2011.01.010

Abstract:

In order to improve the bias stability of the micro-electro mechanical system(MEMS)gyroscope and reduce the impact on the bias from environmental temperature, a digital signal processing method is described for improving the accuracy of the drive phase in the gyroscope drive mode. Through the principle of bias signal generation, it can be concluded that the deviation of the drive phase is the main factor affecting the bias stability. To fulfill the purpose of precise drive phase control, a digital signal processing circuit based on the field-programmable gate array(FPGA)with the phase-lock closed-loop control method is described and a demodulation method for phase error suppression is given. Compared with the analog circuit, the bias drift is largely reduced in the new digital circuit and the bias stability is improved from 60 to 19 °/h. The new digital control method can greatly increase the drive phase accuracy, and thus improve the bias stability.

为了增强硅微机械陀螺仪的零偏稳定性, 减少其受温度的影响, 从数字信号处理的角度提出了一种提高驱动模态驱动相位精确度的方法.通过零偏信号生成的原理, 分析出驱动相位的偏差是影响其性能的主要因素.采用基于FPGA数字信号处理实现方式的锁相环闭环控制原理, 实现了对驱动相位的精确控制.给出了一种抑制相位误差的解调方法.对比模拟电路, 新型数字电路很好地抑制了零偏的漂移, 零偏稳定性由60°/h提高到19°/h.新的数字控制方法显著提高了对驱动相位的控制精度, 达到了增强零偏稳定性的目的.

References:

[1] George T. Overview of MEMS/NEMS technology development for space applications at NASA/JPL[C]//Proceedings of SPIE: Smart Sensors, Actuators, and MEMS. Maspalomas, Gran Canaria, Spain, 2003: 136-148.
[2] Brabour N, Schmidt G. Inertial sensor technology trends[J]. IEEE Sensors Journal, 2001, 1(4):332-339.
[3] Raman J, Cretu E, Rombouts P, et al. A closed-loop digitally controlled MEMS gyroscope with unconstrained sigma-delta force-feedback[J]. IEEE Sensors Journal, 2009, 9(3):297-305.
[4] Keymeulen D, Peay C, Food D, et al. Control of MEMS disc resonance gyroscope using a FPGA platform[C]//2008 IEEE Aerospace Conference. Big Sky, MT, USA, 2008:1-8.
[5] Yang Bo. Research on silicon micro gyroscope measurement and control technology [D]. Nanjing: School of Instrument Science and Engineering of Southeast University, 2007.(in Chinese)
[6] Palomaki K, Niittylahti J, Renfors M. Numerical sine and cosine synthesis using a complex multiplier[C]//Proc of IEEE International Symposium on Circuits and Systems. Orlando, FL, USA, 1999: 356-359.
[7] Zhou Wenwen, Zhang Rong, Zhou Bin. Drive loop design of single axis gyroscope based on SOPC[J]. Journal of Chinese Inertial Technology, 2009, 17(1):67-70.(in Chinese)
[8] Zhou Bin, Zhang Rong, Chen Zhiyong. Online self-compensation for enhanced the scale factor stability of a micromachined gyroscope[J]. Journal of Physics: Conference Series, 2009, 188(1): 012043.

Memo

Memo:

Biographies: Xia Guoming(1983—), male, graduate; Wang Shourong(corresponding author), male, doctor, professor, srwang@seu.edu.cn.
Foundation items: The National Natural Science Foundation of China(No.60974116), the Research Fund of Aeronautics Science(No.20090869007), Specialized Research Fund for the Doctoral Program of Higher Education(No.200802861063).
Citation: Xia Guoming, Yang Bo, Wang Shourong. New digital drive phase control for improving bias stability of silicon MEMS gyroscope[J].Journal of Southeast University(English Edition), 2011, 27(1):47-51.[doi:10.3969/j.issn.1003-7985.2011.01.010]

Common functions