[1] Zhang Jinlong, Yu Lingling, Liu Jingnan, et al. Ultra-precision positioning control technique based on neural network [J]. Journal of Southeast University (English Edition), 2006, 22 (1): 130-133. [doi:10.3969/j.issn.1003-7985.2006.01.028]
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Ultra-precision positioning control technique based on neural network(
)
)Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]
- Volumn:
- 22
- Issue:
- 2006 1
- Page:
- 130-133
- Research Field:
- Automation
- Publishing date:
- 2006-03-20
Info
- Title:
- Ultra-precision positioning control technique based on neural network
- Author(s):
- Zhang Jinlong1; 2; Yu Lingling1; Liu Jingnan1
-
1 Department of Automatic Control Engineering, Southeast University, Nanjing 210096, China
2 College of Electrical and Automatic Engineering, Nanjing Normal University, Nanjing 210042, China
- PACS:
- TP274+.5
- DOI:
- 10.3969/j.issn.1003-7985.2006.01.028
- Abstract:
- Due to the non-linearity behavior of the precision positioning system, an accurate mathematical control model is difficult to set up, a novel control method for ultra-precision alignment is presented.This method relies on neural network and alignment marks that are in the form of 100 μm pitch gratings.The 0-th order Moiré signals’ intensity and its intensity rate are chosen as input variables of the neural network.The characteristics of the neural network make it possible to perform self-training and self-adjusting so as to achieve automatic precision alignment.A neural network model for precision positioning is set up.The model is composed of three neural layers, i.e. input layer, hidden layer and output layer.Driving signal is obtained by mapping Moiré signals’ intensity and its intensity rate.The experimental results show that neural network control for precision positioning can effectively improve positioning speed with high accuracy.It has the advantages of fast, stable response and good robustness.The device based on neural network can achieve the positioning accuracy of ±0.5 μm.
References:
[1] Zhang Jinlong, Cheng Congyan, Yu Lingling.Ultra-precision alignment technique based on modified Moiré signals [J].Journal of Southeast University: English Edition, 2005, 21(1):16-19.
[2] Akihito M, Furuhasi H.Influences of the inclination of gratings on the alignment accuracies in Moiré alignment systems[J].Electrical Engineering in Japan, 2002, 139(2):46-51.
[3] Kanjilal A K, Narain R, Sharma R, et al.Automatic mask alignment without a microscope [J].IEEE Transactions on Instrumentation and Measurement, 1995, 44(3):806-809.
[4] Itoh J, Kanayama T.Optical heterodyne detection of mask to wafer displacement for fine alignment[J].Japanese Journal of Applied Physics, 1986, 25(8):684-686.
[5] Singh B P, Goto T, Sharma R, et al.Tracking and dynamic control of the angular alignment position in a photolithographic mask aligner by Moiré interference technique[J].Review of Scientific Instruments, 1995, 66(3):2658-2660.
[6] Liu Jingnan, Furuhashi H, Uchida Y.Automatic mask alignment in the θ direction using Moiré sensors[J].Nanotechnology, 1995, 6(4):135-138.
[7] Zhou L Z, Furuhasi H, Uchida Y.Sensing characteristics of a precision aligner using Moiré gratings for precision alignment system [J].Chinese Journal of Lasers B: English Edition, 2001, 10(4):257-262.
[8] Liu Jingnan, Furuhashi H.Precision position control system using Moiré signals[C]//Proceedings of the 1995 IEEE IECON Conference.Orlando, USA, 1995:968-972.
[9] Hara K, Nomura T, Kimura S, et al.An alignment technique using diffracted Moiré signals [J].Journal of Vacuum Science and Technology, 1989, B7(6):1977-1979.
[10] Uchida Y, Hattori S, Nomura T.An automatic mask alignment technique using Moiré interference [J].Journal of Vacuum Science and Technology, 1987, B5(1):244-247.
[11] Yan Pingfan, Zhang Changshui.Artificial neural networks and simulated evolution calculation [M].Beijing: Tsinghua University Press, 2000: 10-35.(in Chinese)
Memo
- Memo:
- Biographies: Zhang Jinlong(1965—), male, graduate, associate professor;Liu Jingnan(corresponding author), male, doctor, professor, liujn@seu.edu.cn.