[1] Xia Dunzhu, Wang Shourong, Zhou Bailing,. A novel closed-loop vacuum silicon microgyroscope [J]. Journal of Southeast University (English Edition), 2009, 25 (1): 63-67. [doi:10.3969/j.issn.1003-7985.2009.01.014]
Copy
A novel closed-loop vacuum silicon microgyroscope(
)
)Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]
- Volumn:
- 25
- Issue:
- 2009 1
- Page:
- 63-67
- Research Field:
- Instrument Science and Technology
- Publishing date:
- 2009-03-30
Info
- Title:
- A novel closed-loop vacuum silicon microgyroscope
- Author(s):
- Xia Dunzhu; Wang Shourong; Zhou Bailing
- School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
- Keywords:
- silicon micro-gyroscope(SMG); self oscillating; dual-channel closed-loop detection; scale factor; zero bias stability
- PACS:
- U666.112
- DOI:
- 10.3969/j.issn.1003-7985.2009.01.014
- Abstract:
- A novel closed-loop control strategy of a silicon micro-gyroscope(SMG)is proposed.The SMG is sealed in metal can package in drive and sense modes and works under the air pressure of 10 Pa. Its quality factor reaches greater than 10 000.Self-oscillating and closed-loop methods based on electrostatic force feedback are adopted in both measure and control circuits.Both single side driving and sensing methods are used to simplify the drive circuit.These dual channel decomposition and reconstruction closed loops are applied in sense modes.The testing results demonstrate that useful signals and guadrature signals do not interact with each other because of the decoupling of their phases.Under the condition of a scale factor of 9.6 mV/((°)·s), in a full measurement range of ±300(°)/s, the zero bias stability reaches 28(°)/h with a nonlinear coefficient of 400×10-6 and a simulated bandwidth of more than 100 Hz.The overall performance is improved by two orders of magnitude in comparison to that at atmospheric pressure.
References:
[1] Tang T K.A packaged silicon MEMS vibratory gyroscope for microspacecraft [C]//Proc IEEE MicroElectro Mechanical Systems.Nagoya, 1997:500-505.
[2] Sharma A, Zaman M F, Ayazi F.A 0.2/hr micro-gyroscope with automatic CMOS mode matching [C]//Proc IEEE Int Solid-State Circuits Conf Dig Tech Papers. San Francisco, CA, 2007:386-387.
[3] Saukoski M, Aaltonen L, Salo T, et al.Integrated readout and control electronics for a microelectromechanical angular velocity sensor [C]//Proc Eur Solid-State Circuits Conf.Montreux, Switzerland, 2006:243-246.
[4] Phani A S, Seshia A A, Palaniapan M, et al.Modal coupling in micromechanical vibratory rate gyroscopes[J].IEEE Sensors Journal, 2006, 6(5):1144-1152.
[5] Loveday P W, Rogers C A.The influence of control system design on the performance of vibratory gyroscopes[J].Journal of Sound and Vibration, 2002, 255(3):417-432.
[6] Tang William Chi-Keung.Electrostatic comb drive for resonant and actuator applications[D].Berkeley:University of California at Berkeley, 1990.
[7] Yeh Bao Y, Liang Yung C.Mathematical modelling on the quadrature error of low-rate microgyroscope for aerospace applications [J].Analog Integrated Circuits and Signal Processing, 2001, 29(1/2):85-94.
[8] Saukoski Mikko, Aaltonen Lasse, Halonen Kari A I.Zero-rate output and quadrature compensation in vibratory MEMS gyroscopes[J].IEEE Sensors Journal, 2007, 7(12):1639-1652.
[9] Zeng Hui, Zhou Bailing, Su Yan, et al.Research of MEMS gyroscope detection feedback control system[J].Sensor Technology, 2005, 25(6):32-34.(in Chinese)
[10] Ferguson Michael I, Keymenlen Didier, Peay Chris, et al.Effect of temperature on MEMS vibratory rate gyroscope [C]//2005 IEEE Aerospace Conference Proceedings.Big Sky, MT, USA, 2005:1-6.
[11] Shcheglov K, Evans C, Gutierrez R, et al.Temperature dependent characteristics of the JPL silicon MEMS gyroscope [C]//2000 IEEE Aerospace Conference Proceedings.Big Sky, MT, USA, 2000:403-411.
Memo
- Memo:
-
Biography: Xia Dunzhu(1978—), male, doctor, lecturer, xiadz-1999@163.com.
Foundation items: The National High Technology Research and Development Program of China(863 Program)(No.2002AA812038), the National Defense Pre-Research Support Program(No.41308050109).
Citation: Xia Dunzhu, Wang Shourong, Zhou Bailing.A novel closed-loop vacuum silicon microgyroscope[J].Journal of Southeast University(English Edition), 2009, 25(1):63-67.