[1] Wu Rui, Liao Xiaoping, Zhang Zhiqiang, Yang Le, et al. Analysis of substrate eddy effects and distribution effectsin silicon-based inductor model [J]. Journal of Southeast University (English Edition), 2009, 25 (1): 57-62. [doi:10.3969/j.issn.1003-7985.2009.01.013]

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Analysis of substrate eddy effects and distribution effectsin silicon-based inductor model()

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Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]

Volumn:

25

Issue:

2009 1

Page:

57-62

Research Field:

Circuit and System

Publishing date:

2009-03-30

Info

Title:

Analysis of substrate eddy effects and distribution effectsin silicon-based inductor model

Author(s):

Wu Rui;  Liao Xiaoping;  Zhang Zhiqiang;  Yang Le

Key Laboratory of MEMS of Ministry of Education, Southeast University, Nanjing 210096, China

Keywords:

planar spiral inductors;  substrate eddy effects;  distribution effects;  equivalent circuit model

PACS:

TN405

DOI:

10.3969/j.issn.1003-7985.2009.01.013

Abstract:

The concepts of substrate eddy influence factor and distribution-effects-occurring frequency are presented.The effects of substrate resistivity and inductor spiral length on the substrate eddy and distribution effects are captured.The substrate eddy influence factors of an inductor(6 turn, 3 060 μm in length)fabricated on low(1 Ω·cm)and high resistivity(1 000 Ω·cm)silicon substrates are 0.3 and 0.04, and the distribution-effects-occurring frequencies are 1.8 GHz and 14.5 GHz, respectively.The measurement results show that the equivalent circuit model of the inductor on low resistivity silicon must take into consideration substrate eddy effects and distribution effects.However, the circuit model of the inductor on high resistivity silicon cannot take into account the substrate eddy effects and the distribution effects at the frequencies of interest. Its simple model shows agreement with the measurements, and the contrast is within 7%.

References:

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Memo

Memo:

Biographies: Wu Rui(1986—), male, graduate; Liao Xiaoping(corresponding author), male, doctor, professor, xpliao@seu.edu.cn.
Foundation items: The National Natural Science Foundation of China(No.60676043), the National High Technology Research and Development Program of China(863 Program)(No.2007AA04Z328).
Citation: Wu Rui, Liao Xiaoping, Zhang Zhiqiang, et al.Analysis of substrate eddy effects and distribution effects in silicon-based inductor model[J].Journal of Southeast University(English Edition), 2009, 25(1):57-62.

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