|Table of Contents|

[1] Kang Xin, Dong ELiang, Zhang Dingguo, et al. Nonlinear static characteristicsof piezoelectric unimorph bending micro actuators [J]. Journal of Southeast University (English Edition), 2010, 26 (4): 603-607. [doi:10.3969/j.issn.1003-7985.2010.04.021]
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Nonlinear static characteristicsof piezoelectric unimorph bending micro actuators()
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Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]

Volumn:
26
Issue:
2010 4
Page:
603-607
Research Field:
Mathematics, Physics, Mechanics
Publishing date:
2010-12-30

Info

Title:
Nonlinear static characteristicsof piezoelectric unimorph bending micro actuators
Author(s):
Kang Xin1 2 Dong ELiang3 Zhang Dingguo1
1School of Science, Nanjing University of Science and Technology, Nanjing 210094, China
2Department of Mechanical and Aeronautical Engineering, University of California, Davis, Davis 95616, USA
3 School of Civil Engineering, Southeast University, Nanjing 210096, China
Keywords:
nonlinear static characteristic piezoelectric unimorph micro actuator couple stress theory Rayleigh-Ritz method
PACS:
O343.5
DOI:
10.3969/j.issn.1003-7985.2010.04.021
Abstract:
The nonlinear static characteristic of a piezoelectric unimorph cantilever micro actuator driven by a strong applied electric field is studied based on the couple stress theory. The cantilever actuator consists of a piezoelectric layer, a passive(elastic)layer and two electrode layers. First, the nonlinear static characteristic of the actuator caused by the electrostriction of the piezoelectric layer under a strong applied electric field is analyzed using the Rayleigh-Ritz method. Secondly, since the thickness of the cantilever beam is in micro scale and there exists a size effect, the size dependence of the deformation behavior is evaluated using the couple stress theory. The results show that the nonlinearities of the beam deflection increase along with the increase of the applied electric field which means that softening of the micro beam rigidity exists when a strong external electric field is applied. Meanwhile, the optimal value of the thickness ratio for the passive layer and the piezoelectric layer is not around 1.0 which is usually adopted by some previous researchers. Since there exists a size effect of the micro beam deflection, the optimal value of this thickness ratio should be greater than 1.0 in micro scale.

References:

[1] Uchino K. Piezoelectric actuator and ultrasonic motor [M]. Boston: Kluwer Academic, 1996.
[2] Muralt P, Ledermann N, Baborowski J. Piezoelectric micromachined ultrasonic transducers based on PZT thin film [J]. IEEE Transactions on Ultrasonics, Ferroelectrics, and Frequency Control, 2005, 52(12): 2276-2288.
[3] Arafa M, Baz A. On the nonlinear behavior of piezoelectric actuator [J]. Journal of Vibration and Control, 2004, 10(3): 387-398.
[4] Joshi S P. Nonlinear constitutive relation for piezoceramic materials [J]. Smart Mater and Struct, 1992, 1(1): 80-83.
[5] Wang Q M, Zhang Q M, Xu B M, et al. Cross. Nonlinear piezoelectric behavior of ceramic bending mode actuators under strong electric fields [J]. Journal of Applied Physics, 1999, 86(6): 3352-3360.
[6] Yao Linquan, Ding Rui. The dynamic analysis of piezoelectric bending actuator considering nonlinear piezoelectric effect [J]. Acta Mechanica Sinica, 2005, 37(2): 183-189.(in Chinese)
[7] Yao L Q, Zhang J G, Lu L, et al. Nonlinear static characteristics of piezoelectric bending actuator under strong applied electric field [J]. Sensor and Actuator A, 2004, 115(1): 168-175.
[8] Chong A C M, Yang F, Lam D C C, et al. Torsion and bending of micro-scale structures [J]. J Mater Res, 2001, 16(4): 1052-1058.
[9] Fleck N A, Muller G M, Ashby M F, et al. Strain gradient plasticity: theory and experiment [J]. Acta Metall Mater, 1994, 42(2): 475-487.
[10] Stolken J S, Evans A G. A microbend test method for measuring the plasticity length scale [J]. Acta Mater, 1998, 46(14): 5109-5115.
[11] Yang F, Chong A C M, Lam D C C, et al. Couple stress based strain gradient theory for elasticity [J]. International Journal of Solids and Structures, 2002, 39(10): 2731-2743.
[12] Mindlin R D, Tiersten H F. Effect of couple-stresses in linear elasticity [J]. Arch Rational Mech Anal, 1962, 11(1): 415-448.
[13] Toupin R A. Elastic materials with couple-stresses [J]. Arch Rational Mech Anal, 1962, 11(1): 385-414.
[14] Ding Jianning, Meng Yonggang, Wen Shizhu. Research of the size effect on strength of polysilicon micro-electro-mechanical devices [J]. Journal of Mechanical Strength, 2001, 23(4): 385-388.(in Chinese)
[15] Hwang Kehchih, Qiu Xinming, Jiang Hanqing. Recent advances in strain gradient plasticity-I-couple stress theory and SG theory [J]. Journal of Mechanical Strength, 1999, 21(2): 81-87.(in Chinese)
[16] Chen Shaohua, Wang Ziqiang. Advances in strain gradient theory [J]. Advances in Mechanics, 2003, 33(2): 207-216.(in Chinese)

Memo

Memo:
Biography: Kang Xin(1966—), female, doctor, associate professor, ckkang@mail.njust.edu.cn.
Foundation item: The National Natural Science Foundation of China(No. 10772086, 10772085).
Citation: Kang Xin, Dong ELiang, Zhang Dingguo. Nonlinear static characteristics of piezoelectric unimorph bending micro actuators[J].Journal of Southeast University(English Edition), 2010, 26(4):603-607.
Last Update: 2010-12-20