[1] Wang Xiaolei, Li Hongsheng, Yang Bo,. Design and implementation of digital closed-loopdrive control system of a MEMS gyroscope [J]. Journal of Southeast University (English Edition), 2012, 28 (1): 35-40. [doi:10.3969/j.issn.1003-7985.2012.01.007]

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Design and implementation of digital closed-loopdrive control system of a MEMS gyroscope()

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Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]

Volumn:

28

Issue:

2012 1

Page:

35-40

Research Field:

Instrument Science and Technology

Publishing date:

2012-03-30

Info

Title:

Design and implementation of digital closed-loopdrive control system of a MEMS gyroscope

Author(s):

Wang Xiaolei;  Li Hongsheng;  Yang Bo

School of Instrument Science and Engineering, Southeast University, Nanjing 210096, China
Key Laboratory of Micro-Inertial Instrument and Advanced Navigation Technology of Ministry of Education, Southeast University, Nanjing 210096, China

Keywords:

micro electromechanical system(MEMS)digital gyroscope;  drive frequency;  phase-locked loop(PLL);  oscillating amplitude;  automatic gain control(AGC)

PACS:

U666.123

DOI:

10.3969/j.issn.1003-7985.2012.01.007

Abstract:

In order to effectively control the working state of the gyroscope in drive mode, the drive characteristics of the micro electromechanical system(MEMS)gyroscope are analyzed in principle. A novel drive circuit for the MEMS gyroscope in digital closed-loop control is proposed, which utilizes a digital phase-locked loop(PLL)in frequency control and an automatic gain control(AGC)method in amplitude control. A digital processing circuit with a field programmable gate array(FPGA)is designed and the experiments are carried out. The results indicate that when the temperature changes, the drive frequency can automatically track the resonant frequency of gyroscope in drive mode and that of the oscillating amplitude holds at a set value. And at room temperature, the relative deviation of the drive frequency is 0.624×10^-6 and the oscillating amplitude is 8.0×10^-6, which are 0.094% and 18.39% of the analog control program, respectively. Therefore, the control solution of the digital PLL in frequency and the AGC in amplitude is feasible.

References:

[1] Yin Yong, Wang Shourong, Wang Cunchao, et al. Structure-decoupled dual-mass MEMS gyroscope with self-adaptive closed-loop detection[C]//The 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. Xiamen, China, 2010: 624-627.
[2] Niu Shaohua, Gao Shiqiao, Liu Haipeng. A digital control system for micro-comb gyroscope[C]//The 9th International Conference on Electronic Measurement and Instruments. Beijing, China, 2009:757-760.
[3] Tan Xiaoyun, Lei Longgang, Wang Guanshi. The research on the dual closed-loop drive circuits for micro-machined gyroscope[J]. Chinese Journal of Sensors and Actuators, 2010, 23(10):1449-1453.(in Chinese)
[4] Zhang Qiwei, Yang Bo, Li Hongsheng. Design on drive and sense circuitry for a kind of silicon micro-machined vibratory gyroscope[J]. Chinese Journal of Sensors and Actuators, 2008, 21(12):2009-2013.(in Chinese)
[5] Xia Guoming, Yang Bo, Wang Shourong. New digital drive phase control for improving bias stability of silicon MEMS gyroscope[J]. Journal of Southeast University: English Edition, 2011, 27(1): 47-51.
[6] Shaban A, EI-badry M, EI-sayed A. Analysis and design of Gyro-drive mode loop with amplitude control[C]//The 4th International Design and Test Workshop Conference. Riyadh, Saudi Arabia, 2009:1-4.
[7] Liu Xiaowei, Mo Bing, Tan Xiaoyun, et al. Closed loop drive circuit for the micromachined gyroscope based on the phase locked technology [J]. Nanotechnology and Precision Engineering, 2008, 6(6):458-463.(in Chinese)
[8] Wang Xiaolei, Li Hongsheng, Xia Guoming, et al. Research and experiment on the drive frequency control of the MEMS gyroscope[C]//The Second International Conference on Mechanic Automation and Control Engineering. Hohhot, China, 2011:547-550.
[9] Saukoski M, Aaltonen L, Halonen K. Effects of synchronous demodulation in vibratory MEMS gyroscopes: a theoretical study [J]. IEEE Sensors Journal, 2008, 8(10):1722-1733.
[10] Li Zhipeng, Guo Yong, Shen Jun. Design of DDS signal generator based on FPGA [J]. Control and Automation, 2007, 23(19):175-177.(in Chinese)
[11] Yin Yong, Wang Shourong, Wang Cunchao, et al. Drive mode test of dual mass MEMS gyroscope[J].Optics and Precision Engineering, 2009, 17(6):1355-1360.
[12] Xia Guoming, Wang Shourong, Yang Bo. Research and test on silicon micro-gyroscope temperature characteristics [J]. Measurement and Control Technology, 2008, 28(9):9-13.(in Chinese)
[13] Wang Cunchao, Su Yan, Wang Shourong. Research on self-excited driving of the silicon micromachined vibratory gyroscope driver [J]. Chinese Journal of Sensors and Actuators, 2006, 19(2):364-370.(in Chinese)

Memo

Memo:

Biographies: Wang Xiaolei(1980—), male, graduate; Li Hongsheng(corresponding author), male, doctor, professor, hsli@seu.edu.cn.
Foundation items: The National Natural Science Foundation of China(No.60974116), the Research Fund of Aeronautics Science(No.20090869007), Specialized Research Fund for the Doctoral Program of Higher Education(No.200902861063).
Citation: Wang Xiaolei, Li Hongsheng, Yang Bo.Design and implementation of digital closed-loop drive control system of a MEMS gyroscope[J].Journal of Southeast University(English Edition), 2012, 28(1):35-40.[doi:10.3969/j.issn.1003-7985.2012.01.007]

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