[1] Ji Xunsheng, Wang Shourong, Xu Yishen, et al. Performance analysis on captive silicon micro-accelerometer system [J]. Journal of Southeast University (English Edition), 2006, 22 (1): 69-72. [doi:10.3969/j.issn.1003-7985.2006.01.015]

Copy

Performance analysis on captive silicon micro-accelerometer system()

Share：

Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]

Volumn:

22

Issue:

2006 1

Page:

69-72

Research Field:

Mechanical Engineering

Publishing date:

2006-03-20

Info

Title:

Performance analysis on captive silicon micro-accelerometer system

Author(s):

Ji Xunsheng¹;  2;  Wang Shourong¹;  Xu Yishen¹;  Sheng Ping¹

¹ Department of Instrument Science and Technology, Southeast University, Nanjing 210096, China
² Research Center of Control Science and Engineering, Southern Yangtze University, Wuxi 214122, China

Keywords:

micro-accelerometer;  sensitivity;  spectral density;  mechanical-thermal noise;  damping

PACS:

TH824.4

DOI:

10.3969/j.issn.1003-7985.2006.01.015

Abstract:

The operational principle and the lumped parameters model of capacitive micro-accelerometer are introduced.The equivalent stiffness of different directions of the accelerometer is given.From the point of view of energy and mechanics, expressions of some key parameters, such as the damping, sensitivity, resolution of the accelerometer, are derived.The accelerometer noise behavior of mechanical-thermal noise in the open-loop system, along with the dynamic range of the open-loop system and closed-loop system is analyzed.The result is that the noise of the capacitive micro accelerometer is dominated by the magnitude of mechanical-thermal noise.At the same time, the magnitude of mechanical-thermal noise depends on the temperature and magnitude of mechanical damp. The result of the measurement from the implemented closed-loop micro-accelerometer system shows that the resolution is the level of mg, and the measurement range is from -50g to 50g.

References:

[1] Wang Shourong.Theory and application of the silicon micro-inertial instruments[M].Nanjing: Southeast University Press, 2000: 30-46.(in Chinese)
[2] Wei Hailong, Shan Guangbao, Liu Jianchao. Modal analysis and simulation-validation of a high-resolution micromechanical silicon accelerometer [J]. Microelectronics & Computer, 2003, 20(4):70-72.(in Chinese)
[3] Yang J. Squeeze-film damping for MEMS structures [D].Cambridge:Massachusetts Institute of Technology, 1998: 12-52.
[4] Pallas-Areny R, Webster J G.Sensors and signal conditioning[M]. 2nd ed.John Wiley and Sons, 2001: 112-180.
[5] Gabrielson T.Mechanical-thermal noise in micro-machined acoustic and vibration sensor[J]. IEEE Transactions on Electron Devices, 1993, 40(5):903-909.
[6] VanKampen R P.Bulk-micromachined capacitive servo-accelerometer [D].Netherland:Delft University of Technology, 1995.
[7] Kraft M, Lewis C P, Hesketh T G.Closed-loop silicon accelero-meters[J].IEE Proc Circuits, Devices and Systems, 1998, 145(5):325-331.

Memo

Memo:

Biographies: Ji Xunsheng(1969—), male, graduate;Wang Shourong(corresponding author), male, doctor, professor, srwang@seu.edu.cn.

Common functions