[1] Zhou Binghai, Wang Zhu, Chen Jia,. Scheduling method for single-arm cluster toolsof wafer fabrications with residency and continuous reentrancy [J]. Journal of Southeast University (English Edition), 2013, 29 (2): 187-193. [doi:10.3969/j.issn.1003-7985.2013.02.014]

Copy

Scheduling method for single-arm cluster toolsof wafer fabrications with residency and continuous reentrancy()

Share：

Journal of Southeast University (English Edition)[ISSN:1003-7985/CN:32-1325/N]

Volumn:

29

Issue:

2013 2

Page:

187-193

Research Field:

Computer Science and Engineering

Publishing date:

2013-06-20

Info

Title:

Scheduling method for single-arm cluster toolsof wafer fabrications with residency and continuous reentrancy

Author(s):

Zhou Binghai;  Wang Zhu;  Chen Jia

School of Mechanical Engineering, Tongji University, Shanghai 201804, China

Keywords:

cluster tools;  scheduling;  residency time;  continuous reentrancy

PACS:

TP391

DOI:

10.3969/j.issn.1003-7985.2013.02.014

Abstract:

In order to enhance the utilization of single-arm cluster tools and optimize the scheduling problems of dynamic reaching wafers with residency time and continuous reentrancy constraints, a structural heuristic scheduling algorithm is presented. A nonlinear programming scheduling model is built on the basis of bounding the scheduling problem domain. A feasible path search scheduling method of single-arm robotic operations is put forward with the objective of minimal makespan. Finally, simulation experiments are designed to analyze the scheduling algorithms. Results indicate that the proposed algorithm is feasible and valid to solve the scheduling problems of multiple wafer types and single-arm clusters with the conflicts and deadlocks generated by residency time and continuous reentrancy constraints.

References:

[1] Venkatesh S, Davenport R, Foxhoven P, et al. A steady-state throughput analysis of cluster tools: dual-blade versus single-blade robots[J]. IEEE Transactions on Semiconductor Manufacturing, 1997, 10(4): 418-424.
[2] Lee T E, Park S H. An extended event graph with negative places and tokens for timed window constraints[J]. IEEE Transactions on Automation Science and Engineering, 2005, 2(4): 319-332.
[3] Kim J H, Lee T E, Park D B, et al. Scheduling analysis of time-constrained dual-armed cluster tools [J]. IEEE Transactions on Semiconductor Manufacturing, 2003, 16(3): 521-534.
[4] Rostami S, Hamidzadeh B. An optimal periodic scheduler for dual-arm robots in cluster tools with residency constraints[J]. IEEE Transactions on Robotics and Automation, 2001, 17(5): 609-618.
[5] Rostami S, Hamidzadeh B. An optimal residency-aware scheduling technique for cluster tools with buffer module[J]. IEEE Transactions on Semiconductor Manufacturing, 2004, 17(1): 68-73.
[6] Yoon H J, Lee D Y. On-line scheduling of integrated single wafer processing tools with temporal constraints[J]. IEEE Transactions on Semiconductor Manufacturing, 2006, 18(3): 390-398.
[7] Perkinson T L, Gyurcsik R S, McLarty P K. Single-wafer cluster tool performance: an analysis of the effects of redundant chambers and revisitation sequences on throughput[J]. IEEE Transactions on Semiconductor Manufacturing, 1996, 9(3): 384-400.
[8] Lee H Y, Lee T E. Scheduling single-arm cluster tools with reentrant wafer flows[J]. IEEE Transactions on Semiconductor Manufacturing, 2006, 19(2): 226-240.
[9] Zuberek W M. Cluster tools with chamber revisiting-modeling and analysis using timed Petri nets[J]. IEEE Transactions on Semiconductor Manufacturing, 2004, 17(3): 333-344.
[10] Zuberek W M. Petri net modeling and performance analysis of cluster tools with chamber revisiting[C]//The 8th International Conference on Emerging Technologies and Factory Automation. Antibes-Juan les Pins, France, 2001, 2: 105-112.
[11] Jung C Y, Lee T E. An efficient mixed integer programming model based on timed Petri nets for diverse complex cluster tool scheduling problems[J]. IEEE Transactions on Semiconductor Manufacturing, 2012, 25(2): 186-199.
[12] Wu N Q, Chu F, Chu C B, et al. Petri net-based scheduling of single-arm cluster tools with reentrant atomic layer deposition processes[J]. IEEE Transactions on Automation Science and Engineering, 2011, 8(1): 42-55.
[13] Wu N Q, Chu F, Chu C B, et al. Petri net-based cycle time analysis of dual-arm cluster tools with wafer revisiting and swapping strategy[C]//2011 IEEE International Conference on Robotics and Automation. Shanghai, China, 2011: 5499-5504.
[14] Kim D K, Jung C Y, Lee T E, et al. Cyclic scheduling of cluster tools with non-identical chamber access times[C]//Proceedings of the 2011 Winter Simulation Conference. Phoenix, AZ, USA, 2011: 2068-2079.
[15] Wu N Q, Zhou M C. Schedulability analysis and optimal scheduling of dual-armed cluster tools with residency time constraint and activity time variation[J]. IEEE Transactions on Automation Science and Engineering, 2012, 9(1): 203-209.

Memo

Memo:

Biography: Zhou Binghai(1965—), male, doctor, professor, bhzhou@tongji.edu.cn.
Foundation item: The National Natural Science Foundation of China(No.71071115, 61273035).
Citation: Zhou Binghai, Wang Zhu, Chen Jia. Scheduling method for single-arm cluster tools of wafer fabrications with residency and continuous reentrancy[J].Journal of Southeast University(English Edition), 2013, 29(2):187-193.[doi:10.3969/j.issn.1003-7985.2013.02.014]

Common functions